Optical deflector



【課題】 共振周波数向上とミラーたわみが抑制された光偏向器を提供する。 【解決手段】 可動板の一部を多孔質シリコンとする。 【選択図】 図1
PROBLEM TO BE SOLVED: To provide an optical deflector high in resonance frequency and suppressive in the deflection of a mirror. SOLUTION: The optical deflector has a movable plate which is supported to a substrate by beams and is formed of porous silicon for a part thereof. In the light deflector, the beams, the movable plate and the substrate are integrally formed of a silicon substrate, and the averagedensity of the silicon constituting the movable plate is ≤2.0g/cm 3 . COPYRIGHT: (C)2005,JPO&NCIPI




Download Full PDF Version (Non-Commercial Use)

Patent Citations (0)

    Publication numberPublication dateAssigneeTitle

NO-Patent Citations (0)


Cited By (8)

    Publication numberPublication dateAssigneeTitle
    CN-103180772-AJune 26, 2013日本电气株式会社Optical scanning device
    JP-2008170654-AJuly 24, 2008Seiko Epson Corp, セイコーエプソン株式会社アクチュエータ、光スキャナおよび画像形成装置
    JP-2010128116-AJune 10, 2010Ricoh Co Ltd, 株式会社リコーOptical scanner
    JP-2012247602-ADecember 13, 2012Ricoh Co Ltd, 株式会社リコーElectromagnetic micromirror device
    US-2013229698-A1September 05, 2013Nec CorporationOptical scanning device
    US-8681410-B2March 25, 2014Brother Kogyo Kabushiki KaishaOptical scanner, image forming apparatus and image display apparatus
    US-9122059-B2September 01, 2015Nec CorporationOptical scanning device
    WO-2012070610-A1May 31, 2012日本電気株式会社Optical scanning device