Optical deflector

光偏向器

Abstract

【課題】 共振周波数向上とミラーたわみが抑制された光偏向器を提供する。 【解決手段】 可動板の一部を多孔質シリコンとする。 【選択図】 図1
PROBLEM TO BE SOLVED: To provide an optical deflector high in resonance frequency and suppressive in the deflection of a mirror. SOLUTION: The optical deflector has a movable plate which is supported to a substrate by beams and is formed of porous silicon for a part thereof. In the light deflector, the beams, the movable plate and the substrate are integrally formed of a silicon substrate, and the averagedensity of the silicon constituting the movable plate is ≤2.0g/cm 3 . COPYRIGHT: (C)2005,JPO&NCIPI

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