圧力検出装置用パッケージ

Package for pressure detector

Abstract

PROBLEM TO BE SOLVED: To provide a package for pressure detector which is enhanced in detecting sensitivity for an externally applied pressure with a small size and can perform precise detection over a long period with high reliability. SOLUTION: This package for pressure detector comprises an insulating base body 1 having a mounting part 1b for mounting a semiconductor element 3 on one main surface thereof, an insulating plate 2 bonded to the insulating base body 1 in a flexible state so as to form a closed space with the other main surface of the insulating base body 1, an electrostatic capacity forming first electrode 7 fitted to the insulating base body 1, and a second electrode 9 fitted to the insulating plate 2. The insulating plate 2 has a recessed part on the closed space-side main surface, and the inner side wall surface of the recessed part is inclined so as to extended outwardly from the bottom side of the recessed part to the insulating base body 1 side. COPYRIGHT: (C)2005,JPO&NCIPI
【課題】 小型でかつ外部から加わる圧力の検出感度が高く、長期間にわたって正確に検出することができる信頼性の高い圧力検出装置用のパッケージを提供すること。 【解決手段】 圧力検出装置用パッケージは、一方の主面に半導体素子3が搭載される搭載部1bを有する絶縁基体1と、絶縁基体1の他方の主面との間に密閉空間を形成するように可撓な状態で絶縁基体1に接合された絶縁板2と、絶縁基体1に被着された静電容量形成用の第一電極7と、絶縁板2に被着された第二電極9とを具備する圧力検出装置用パッケージであって、絶縁板2は、密閉空間側の主面に凹部が形成されており、凹部の側壁の内側面は、凹部の底面側から絶縁基体1側に向かうに伴って外側に広がるように傾斜している。 【選択図】 図1

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