電子線装置及び電子線装置用試料ホルダー

Electron beam device and sample holder for electron beam device

Abstract

【課題】 電子顕微鏡で試料の加熱時のガスとの反応過程をリアルタイムで観察する際に起こる、ガスによる鏡体内の真空の悪化や、加熱によるヒーターの伸びからくる試料ドリフトを解決し、高分解能観察を可能にする。 【解決手段】 試料へのガス供給手段に対向してガス排気手段を設け、真空低下を最短時間にとどめた。また、試料を付着させたヒーターをガス導入管内に設け、ガスの鏡体への流出を抑制した。ヒーターの伸びの低減策として、電子線装置用試料ホルダーもしくは電子線装置に、ヒーターの張力調整手段を設けた。 【選択図】図1
<P>PROBLEM TO BE SOLVED: To provide an electron microscope of which, the problem of deterioration of vacuum in a mirror body caused by gas, and drift of sample resulting from the elongation of a heater by heating, which occurs in real-time observation of a reaction process of the sample with the gas in heating are solved, capable of observing with high resolution. <P>SOLUTION: The deterioration of vacuum is confined within a shortest time by arranging a gas exhaust means in opposition to a gas supplying means for a sample. A heater with the sample attached thereto is disposed inside a gas introductory pipe to restrain the gas from flowing into the mirror body. A tension adjustment means of the heater is disposed at a sample holder for an electron beam device or the device as risk reduction measures for the elongation of the heater. <P>COPYRIGHT: (C)2005,JPO&NCIPI

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Cited By (12)

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    JP-2010518583-AMay 27, 2010エフ・イ−・アイ・カンパニー高圧荷電粒子ビーム・システム
    JP-2013134814-AJuly 08, 2013Hitachi High-Technologies Corp, 株式会社日立ハイテクノロジーズElectron microscope and sample holding device for electron microscope
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    WO-2010092747-A1August 19, 2010株式会社 日立ハイテクノロジーズ電子線装置および電子線装置用試料保持装置
    WO-2013099435-A1July 04, 2013株式会社 日立ハイテクノロジーズElectron microscope and device for holding sample for electron microscope
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