圧電振動子の製造方法

Method of manufacturing piezoelectric transducer

Abstract

【課題】圧電振動子の小型化が進むにつれ、パッケージの凹部内底面に形成した電極パッドの面積が非常に小さく、且つ凹部側面と電極パッドとの間隔が狭くなるため、粘性のある導電性接着剤を塗布できるディスペンサでは、導電性接着剤が排出されるディスペンサの先端部を、電極パッド上の導電性接着剤を塗布付着させる位置に配置することが難しい。 【解決手段】圧電振動子の製造方法において、まず、保持具で保持された圧電振動板の長さ方向の端部に形成した外部接続用電極膜の上方を向いている一方の主面上のみに導電性接着剤を塗布する工程と、圧電振動板を、導電性接着剤を塗布した外部接続電極膜が下方に向くよう姿勢を変える工程と、圧電振動板をパッケージの凹部内に挿入し、パッケージの凹部内に形成されている電極パッドと導電性接着剤とを接合固着させる工程と、保持具を圧電振動板から分離する工程の圧電振動子の製造方法。 【選択図】図2
PROBLEM TO BE SOLVED: To solve the problem that the tip of a dispenser discharging a conductive adhesive is difficult to be disposed at a position on an electrode pad where the conductive adhesive is applied and adhered in the dispenser capable of applying the viscous conductive adhesive, because the progress of miniaturization of a piezoelectric transducer causes extreme reduction in an area of an electrode pad formed on the concave portion internal bottom surface of a package and distance between the concave portion side surface and the electrode pad. SOLUTION: A method of manufacturing a piezoelectric transducer is provided with a step in which a conductive adhesive is first applied to only one main surface facing the upper part of an external connection electrode film formed on the end of a longitudinal direction of the piezoelectric transducer plate held with a holding tool, a step in which the piezoelectric transducer plate changes the attitude so that the external connection electrode film applied with the conductive adhesive, a step in which the piezoelectric transducer plate is inserted into a concave portion of the package to join and fix the electrode pad formed in the concave portion of the package with the conductive adhesive faces downward, and a step in which the holding tool is separated from the piezoelectric transducer plate. COPYRIGHT: (C)2005,JPO&NCIPI

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Cited By (4)

    Publication numberPublication dateAssigneeTitle
    JP-2007166435-AJune 28, 2007Daishinku Corp, 株式会社大真空水晶振動デバイス
    JP-2009290711-ADecember 10, 2009Kyocera Kinseki Corp, 京セラキンセキ株式会社圧電振動素子の容器体内面接触防止治具
    JP-2010081225-AApril 08, 2010Epson Toyocom Corp, エプソントヨコム株式会社Manufacturing method of piezoelectric vibrator and tray for manufacturing piezoelectric vibrator
    JP-2016021736-AFebruary 04, 2016アキム株式会社, Akim KkAssembly device and assembly method